多层膜体系微硬度实验的有限元数值模拟

使用FEPG软件编程，对维氏压头的微硬度实验进行模拟，建立了一种针对膜基体系有限元计算的新模型，该模型考虑了边界摩擦和实时跟踪接触因素，在对TiN单层膜和TiN／Ti／TiN／Ti／TiN／Ti6层膜压痕的模拟分析后，得出“载荷-压痕对角线长度关系曲线”和“硬度-载荷关系曲线”以及塑性区分布图，并对微硬度实验中的压头的压入深度相对于单层膜膜层厚度和多层膜中组分膜膜层厚度的取值进行了讨论，与其他文献中的实验比较，结果吻合。说明模型是合理的，结果是可靠的，对实际应用具有指导意义，并为理论分析提供了研究方法。

Numerical Simulation of Nanohardness Experiments of Multilayer Films

By applying FEPG software to program and simulate the nanohardness experiments with Vickers indenter, a new model for finite element calculation of the film-substrate system is founded. The model is considered the factors of the friction on the contact boundary and real-time tracked. Behind simulating and analyzing indentation process of TiN single film and TiN/Ti/TiN/Ti/TiN/Ti six-layerfilm, thecurves on indentation diagonals-load and hardness-load aredrawn and plastic zone distribution map is displayed. The value of pressed deepness of the indenter in TiN single film and TiN/ Ti/TiN/Ti/TiN/Ti six-layer film is discussed in the nanohardness experiments. The results of computation model agreed with the data of the nanohardness experiment in the literature. The model is reasonable, the results are believable. It will provide a direction to practical application and a research method to theoretical analysis.