| 半导体工艺线CAM及SPC的应用 |
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| 引用本文： | 李保第,刘福庆,李彦伟,杨中月,胡玲,崔玉兴,付兴昌. 半导体工艺线CAM及SPC的应用[J]. 微纳电子技术, 2010, 47(10). DOI: 10.3969/j.issn.1671-4776.2010.10.013 |
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| 作者姓名： | 李保第 刘福庆 李彦伟 杨中月 胡玲 崔玉兴 付兴昌 |
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| 作者单位： | 河北半导体研究所,石家庄,050051 |
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| 摘 要： | 探讨了在多品种小批量半导体工艺生产线上开发应用CAM技术及实现SPC控制的方法。作者及同事开发了适用于所在工艺线特点的CAM软件系统程序——WI系统,用于工艺的指导和记录、生产的安排和监控以及数据的记录和提取。利用SPC方法对由WI提取的数据进行统计分析处理,做出控制图,对各种工艺异常进行分析判断进而做出工艺调整,以实现有效的工艺监控,逐步提高工艺加工能力和稳定性。该生产控制方法的应用为工艺线产品的研制和生产提供了有力保证。
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| 关 键 词： | 半导体工艺线 计算机辅助制造(CAM) 统计过程控制(SPC) 工艺监控 工艺调整 控制图 |
Application of CAM and SPC on Semiconductor Process Line |
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| Li Baodi,Liu Fuqing,Li Yanwei,Yang Zhongyue,Hu Ling,Cui Yuxing,Fu Xingchang. Application of CAM and SPC on Semiconductor Process Line[J]. Micronanoelectronic Technology, 2010, 47(10). DOI: 10.3969/j.issn.1671-4776.2010.10.013 |
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| Authors: | Li Baodi Liu Fuqing Li Yanwei Yang Zhongyue Hu Ling Cui Yuxing Fu Xingchang |
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| Affiliation: | Li Baodi,Liu Fuqing,Li Yanwei,Yang Zhongyue,Hu Ling,Cui Yuxing,Fu Xingchang (Hebei Semiconductor Research Institute,Shijiazhuang 050051,China) |
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| Abstract: | The application of CAM and SPC on the multi-species and small batch semiconductor process line was studied.A CAM system called WI system was developed to suit the process line.Through the WI system,the process was directed and recorded,the production was managed and monitored,the data were saved and extracted.The data extracted from the WI were analyzed statistically,and then the SPC control charts were made.Through the SPC control charts,the abnormal situation in the process line was judged,and then the pr... |
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| Keywords: | semiconductor process line computer aided manufacturing(CAM) statistical process control(SPC) process control process adjustment control chart |
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