Electron Temperature Measurement by Floating Probe Method Using AC Voltage |
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Authors: | Satoshi NODOMI Shuichi SATO Mikio OHUCHI |
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Affiliation: | Department of Electrical and Electronic Engineering, Tokyo Denki University,5 Senju-Asahi-cho, Adachi-ku, Tokyo 120-8551, Japan |
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Abstract: | This study presents a novel floating probe method to measure electron temperatures using a hollow cathode-type discharge tube. The proposed method detects a shift in the floating potential when an AC voltage is applied to a probe through an intermediary blocking capacitor.The shift in the floating potential is described as a function of the electron temperature and the applied AC voltage. The floating probe method is simpler than the Langmuir probe method because it does not require the measurement of volt-ampere characteristics. As the input AC voltage increases, the electron temperature converges. The electron temperature measured using the floating probe method with an applied sinusoidal voltage shows a value close to the first(tail)electron temperature in the range of the floating potential. |
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Keywords: | electrostatic probe Langmuir probe floating potential electron temperature sheath |
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