The Characteristics of Columniform Surface Wave Plasma Excited Around a Quartz Rod by 2.45 GHz Microwaves |
| |
| Affiliation: | 1. School of Medical Imaging, Shanghai University of Medicine and Health Sciences,Shanghai 201318, China;2. Department of Light Sources and Illuminating Engineering, Fudan University, Shanghai 200433, China;3. Graduate School of Science and Engineering, Shizuoka University, 3-5-1 Johoku,Hamamatsu 432-8561, Japan;4. School of Electronic and Electrical Engineering, Shanghai University of Engineering Science,Shanghai 201620, China |
| |
| Abstract: | A novel surface wave plasma(SWP) source excited with cylindrical Teflon waveguide has been developed in our previous work. The plasma characteristics have been simply studied.In this work, our experimental device has been significantly improved by replacing the Teflon waveguide with a quartz rod, and then better microwave coupling and higher gas purity can be obtained during plasma discharge. The plasma spatial distributions, both in radial and axial directions, have been measured and the effect of gas pressure has been investigated. Plasma density profiles indicate that this plasma source can produce uniform plasma in an axial direction at low pressure, which shows its potential in plasma processing on a curved surface such as an inner tube wall. A simplified circular waveguide model has been used to explain the principle of plasma excitation. The distinguishing features and potential application of this kind of plasma source with a hardware improvement have been shown. |
| |
| Keywords: | 2.45 GHz microwave surface wave plasma circular waveguide plasma diagnosis |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《等离子体科学和技术》浏览原始摘要信息 |
|
点击此处可从《等离子体科学和技术》下载全文 |
|
