| 亚微米电子束曝光机自动输片控制系统研制 |
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| 引用本文： | 罗正全. 亚微米电子束曝光机自动输片控制系统研制[J]. 微细加工技术, 1999, 0(4): 1-5 |
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| 作者姓名： | 罗正全 |
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| 作者单位： | 中国科学院光电技术研究所!成都610209 |
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| 摘 要： | 概略地介绍了在电子束曝光机上使用的自动输片系统的要求及其组成；较详细地叙述了自动输片控制系统的硬件组成及软件设计；最后给出了运行和检测结果。
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| 关 键 词： | 电子束曝光机 输片机构 自动控制系统 控制软件 |
Control of An Automatic Wafer Transporting System for E Beam Exposure Machine |
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| LUO Zheng quan. Control of An Automatic Wafer Transporting System for E Beam Exposure Machine[J]. Microfabrication Technology, 1999, 0(4): 1-5 |
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| Authors: | LUO Zheng quan |
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| Abstract: | The demands for the automatic wafer transporting system used in E beam exposure machine and its constitution are introduced in brief. The hardware composition and the software design for the automatic wafer transporting system are described in detail. The practical running and testing results are given, too. |
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| Keywords: | Electron beam exposure machine Wafer transport mechanism Automatic control system Control software |
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