| 电沉积法制备彩色滤光膜 |
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| 引用本文： | 付金美 郭金梁. 电沉积法制备彩色滤光膜[J]. 微细加工技术, 1999, 0(2): 28-34 |
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| 作者姓名： | 付金美 郭金梁 |
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| 作者单位： | 清华大学化学系 |
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| 摘 要： | 介绍了电沉积法制备彩色滤光膜的基本原理和电沉积涂料的主要组分，着重介绍了两种不需将透明电极排列成图案的改进的电沉积法——多次曝光法和一次曝光法，这两种工艺通过采用光刻技术克服了传统电沉积法中像素排列的缺点。
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| 关 键 词： | 彩色滤光膜；电沉积法；电沉积涂料；光刻技术 |
A REVIEW ON COLOR FILTER FABRICATION BY ELECTRODEPOSITION PROCESS |
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| Fu Jinmei Guo Jinliang Gao Hongjin. A REVIEW ON COLOR FILTER FABRICATION BY ELECTRODEPOSITION PROCESS[J]. Microfabrication Technology, 1999, 0(2): 28-34 |
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| Authors: | Fu Jinmei Guo Jinliang Gao Hongjin |
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| Abstract: | Principle of electrodeposition process for color filter fabrication and components of electrodeposition coating are presented.Two kinds of electrodeposition methods without previous pattering of the ITO layer are described in detail and the pixel arrangement is not limited in these methods using photolithography technique. |
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| Keywords: | Color filter Electrodeposition process Electrodeposition coating Photolithography technique |
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