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电容式复合介质膜湿敏元件研究
引用本文:卢崇考,周明军.电容式复合介质膜湿敏元件研究[J].郑州轻工业学院学报(自然科学版),2000,15(4):95-98.
作者姓名:卢崇考  周明军
作者单位:信息产业部电子第49研究所,黑龙江,哈尔滨,150001
摘    要:提出一种新型电容式复合介质膜湿敏元件,该组件介质膜是由线性输出、温度特性取向不同的两类感湿介质膜(CAP,PI)互补复合而成的,试验表明,该复合介质膜湿敏元件具有优异的线性输出,其温度系数、重复性也有明显改善。

关 键 词:复合薄膜  补偿  非线性  温度系数  湿敏元件  湿度
文章编号:1004-1478(2000)04-0095-04
修稿时间:2000年7月10日

Research of capacitive humidity sensitive device of compound dielectric film
LU Chong-kao,ZHOU Ming-jun The th Inst. of Electr.,Ministry of Info. Ind.,Haerbin ,China.Research of capacitive humidity sensitive device of compound dielectric film[J].Journal of Zhengzhou Institute of Light Industry(Natural Science),2000,15(4):95-98.
Authors:LU Chong-kao  ZHOU Ming-jun The th Inst of Electr  Ministry of Info Ind  Haerbin  China
Affiliation:LU Chong-kao,ZHOU Ming-jun The 49th Inst. of Electr.,Ministry of Info. Ind.,Haerbin 150001,China
Abstract:A new capacitive humidity sensitive device of the compound dielectric film is developed. It is fabricated by using two humidity sensitive dielectric films(CAB ,PI) with line output and temperature specialty on opposite direction, as a resu lt, the compensation can be realized. The experiment result illustrates that the capacitive humidity sensitive device of the compound dieletric film has good ch aracters of line output. Its temperature coefficient and repeatability are great ly improved.
Keywords:laminated films  compensation  non-linear  temperature coefficien t  humidity sensitive deviX
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