| 钼圆片小黑点形成的原因分析 |
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| 引用本文： | 王引婷,刘仁智,王峰. 钼圆片小黑点形成的原因分析[J]. 中国钼业, 2010, 34(2): 46-48 |
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| 作者姓名： | 王引婷 刘仁智 王峰 |
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| 作者单位： | 金堆城钼业股份有限公司,陕西,西安,710077 |
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| 摘 要： | 通过对钼圆片上小黑点的微观形貌和化学成分进行扫描电镜分析,分析小黑点产生的原因主要是:微观组织致密的小黑点的产生主要是研磨剂Al2O3的刮伤所致;微观组织疏松成裂纹状的小黑点产生是由于钼粉团聚块在烧结中易于产生局部疏松的微观组织所致。
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| 关 键 词： | 小黑点 研磨剂 团聚块 烧结 |
ANALYSIS OF THE REASONS FOR THE FORMATION OF LITTLE BLACK SPOTS ON MOLYBDENUM WAFERS |
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| WANG Yin-ting,LIU Ren-zhi,WANG Feng. ANALYSIS OF THE REASONS FOR THE FORMATION OF LITTLE BLACK SPOTS ON MOLYBDENUM WAFERS[J]. China Molybdenum Industry, 2010, 34(2): 46-48 |
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| Authors: | WANG Yin-ting LIU Ren-zhi WANG Feng |
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| Affiliation: | (Jinduicheng Molybdenum Co.,Ltd.,Xi＇an 710077,Shaannxi,China) |
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| Abstract: | Based on the SEM for the microstructure and chemical composition of little black spots on molybdenum wafers,the causes for the appearance of little black spots may be as follows：（1） little black spots with dense microstructure may be caused by scuffing of aluminum oxides.（2） little black spots with loose microstructure as crack may be caused by appearance of local loose microstructure during sintering of molybdenum agglomeration. |
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| Keywords: | little black spots abrasives agglomeration sintering |
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