立体螺旋线圈微型电感耦合等离子体激发源激发测试研究

介绍了一种电感耦合等离子体(Inductively Coupled Plasma,ICP)光谱激发源,该激发源采用微结构立体螺旋线圈。实验以氩气作为实验气体,采用以立体螺旋线圈作为微电路组件主体的微型ICP激发源研究了立体螺旋线圈激发氩气的最佳结构参数:匝数为4.5匝,线圈直径为5mm,铜线直径为1mm;测得了激发源在激发氩气时的工作条件:最佳射频功率为15~20W,最佳工作气压为50~100Pa,并分析了射频功率和工作气压对于氩气谱线强度的影响。采用射频功率为15W、氩气工作气压为60Pa对空气样品进行激发,检测到氮离子、氦离子等,由此表明立体螺旋线圈微型ICP激发源对空气样品具有激发能力,并且立体螺旋线圈微型ICP激发源比平面微型ICP激发源的激发能力更强。

Study on excitation test of micro inductively coupled plasmaexcitation source with three-dimensional spiral coil

A kind of excitation source for inductively coupled plasma (ICP) spectrometer was introduced. This excitation source adopted the microstructure three-dimensional spiral coil. Argon was selected as the experimental gas in experiments. A micro ICP excitation source based on three-dimensional spiral coil that is the main body of micro-circuit was studied. The optimum structural parameters for the excitation of argon in the three-dimensional spiral coil were obtained: the number of turns was 4.5, the diameter of coil was 5mm, and the diameter of copper wire was 1mm. The working conditions of excitation source were measured when argon was excited: the optimum radio-frequency power was 15-20W, and the optimum gas pressure was 50-100Pa. The influence of radio-frequency power and gas pressure on the spectral intensity of argon was investigated. The air samples were excited when the radio-frequency power was 15W and the argon pressure was 60Pa. Nitrogen ions and helium ions were detected, indicating that the micro ICP excitation source with three-dimensional spiral coil had excitation ability to air sample. Moreover, the micro ICP excitation source with three-dimensional spiral coil showed stronger excitation ability than that of plane micro ICP excitation source.