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Ion beam oxidation of Nb-based Josephson junctions |
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| Authors: | Herwig R. |
| Affiliation: | Universit?t Karlsrühe, Institut für Elektrotechnische Grundlagen der Informatik, Karlsrühe, West Germany; |
| Abstract: | Ion beam oxidation and structuring of Nb-based planar Josephson junctions are briefly described and preliminary results are presented. |
| Keywords: | |