| 采用 CCD 器件的半导体材料应力测试仪的研制 |
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| 引用本文： | 周端,杨银堂. 采用 CCD 器件的半导体材料应力测试仪的研制[J]. 光学精密工程, 1997, 0(4) |
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| 作者姓名： | 周端 杨银堂 |
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| 作者单位： | 西安电子科技大学微电子所 |
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| 摘 要： | 研究和实现了采用面阵ＣＣＤ器件的半导体材料应力测试仪。介绍了测量原理，设计完成了相应的光学测量系统、硬件控制系统和控制测量所需的软件。最后介绍了对硅上ＳｉＯ２、Ｓｉ３Ｎ４膜应力实际测量的结果。
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| 关 键 词： | 面阵CCD；应力测量；薄膜；微型计算机 |
Application of Area array CCD in Semiconductor Material Stresses Measuring |
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| Zhou Duan,Yang Yintang. Application of Area array CCD in Semiconductor Material Stresses Measuring[J]. Optics and Precision Engineering, 1997, 0(4) |
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| Authors: | Zhou Duan Yang Yintang |
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| Abstract: | An instrument based on area array CCD devices for measuring stresses in semiconductor materials is studied and realized.The basic principle of measurement is presented.The optical system,hardware controlling system and measuring software are designed.The experimental results of stresses in SiO 2 and Si 3N 4 film on Si substrate are given. |
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| Keywords: | Stress measuring Area array CCD Thin film Microcomputer |
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