Fourier变换轮廓术中对测量系统的基本要求

本文讨论正在正交光轴测量系统中避免阴影和频谱混叠并保证测量精度的方法，采用减小成像光轴和投影光轴之间的夹角的方法避免阴影；增加投影到被测物体上的条纹数，同时提高ＣＣＤ的分辨率以保证条纹的富里叶谱的基频从其他的频率分量中分离出来，从而提高ＦＴＰ的测量精度。计算机模拟实验证实了该方法的有效性。

Basic Requirement for Measurement System in FTP

In this paper,we discussed the basic requirement for measurement system to avoid shadows and th frequency alias in a crossed optical axes system in FTP.The maximum range of measurement can be extended by employing a geometry with a smaller included angle between axis of the projection and the detection system;In order to eliminate the errors resulting from the smaller included angle,we project a dense grating image onto a object and record the deformed fringe with a high resolution CCD to prevent frequency alias.Computer simulations have proved our analysis.