Abstract: | In the present work, planar waveguides in Y-cut LiNbO3 were obtained using modified proton exchange (PE) conditions of: PE and subsequent annealing (APE), PE in buffered melts (BMPE), APE followed by PE (APE+PE), and PE in vapours (VPE). Benzoic acid was used as the proton source in the PE, BMPE, and (APE+PE) experiments. Cinnamic acid was used for obtaining VPE-waveguides. The main aim was to prevent surface damage of Y-cut crystals due to the strains introduced by proton exchange. The investigations performed showed that the surface etching is probably due to lattice deformation anisotropy leading to higher strains in PE Y-cut samples. Most encouraging results were observed, when an optimized (APE+PE)-procedure was used for waveguide formation. This method is very attractive for the fast preparation of deep high-index and low-loss waveguides in Y-cut LiNbO3. This procedure allows passive and active elements to be produced in one and the same Y-cut substrate of LiNbO3. Similar preliminary results were obtained under VPE conditions. |