Molecular Dynamics Simulations of the Roller Nanoimprint Process: Adhesion and Other Mechanical Characteristics |
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Authors: | Cheng-Da Wu Jen-Fin Lin Te-Hua Fang |
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Affiliation: | (1) Department of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, 701, Taiwan;(2) Institute of Mechanical and Electromechanical Engineering, National Formosa University, Yunlin, 632, Taiwan |
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Abstract: | Molecular dynamics simulations using tight-binding many body potential are carried out to study the roller imprint process
of a gold single crystal. The effect of the roller tooth’s taper angle, imprint depth, imprint temperature, and imprint direction
on the imprint force, adhesion, stress distribution, and strain are investigated. A two-stage roller imprint process was obtained
from an imprint force curve. The two-stage imprint process included the imprint forming with a rapid increase of imprint force
and the unloading stage combined with the adhesion stage. The results show that the imprint force and adhesion rapidly increase
with decreasing taper angle and increasing imprint depth. The magnitude of the maximum imprint force and the time at which
this maximum occurs are proportional to the imprint depth, but independent of the taper angle. In a comparison of the imprint
mechanisms with a vertical imprint case, while high stress and strain regions are concentrated below the mold for vertical
imprint, they also occur around the mold in the case of roller imprint. The regions were only concentrated on the substrate
atoms underneath the mold in vertical imprint. Plastic flow increased with increasing imprint temperature. |
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Keywords: | Roller imprint Nanoimprint Molecular dynamics Nanotribology Taper |
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