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Magnetic Properties of NiCuZn Ferrite Thin Films Prepared by the Sol-gel Method
作者姓名:刘锋
作者单位:Institute of
摘    要:Ni0.4Cu0.2Zn0.4Fe2O4 thin films were fabricated on Si substrates by using the sol-gel method and rapid thermal annealing (RTA), and their magnetic properties and crystalline structures were investigated. The samples calcined at and above 600 ℃ have a single-phase spinel structure and the average grain size of the sample calcined at 600 ℃ is about 20 nm. The initial permeability μi, saturation magnetization M and coercivity H of the samples increase with the increasing calcination temperature. The sample calcined at 600 ℃ exhibits an excellent soft magnetic performance, which has μi=33.97 (10 MHz), Hc=15.62 Oe and Ms=228.877 emu/cm^3. Low-temperature annealing can enhance the magnetic properties of the samples. The work shows that using the sol-gel method in conjunction with RTA is a promising way to fabricate integrated thin-film devices.

关 键 词:镍铜锌铁氧体薄膜  溶胶-凝胶法  快速热处理  磁性
收稿时间:29 March 2006
修稿时间:2006-03-29

Magnetic properties of NiCuZn ferrite thin films prepared by the sol-gel method
Liu?Feng,Ren?Tianling,Yang?Chen,Liu?Litian,Yu?Jun.Magnetic Properties of NiCuZn Ferrite Thin Films Prepared by the Sol-gel Method[J].Journal of Wuhan University of Technology. Materials Science Edition,2007,22(3):506-509.
Authors:Liu Feng  Ren Tianling  Yang Chen  Liu Litian  Yu Jun
Affiliation:(1) Institute of Microelectronics, Tsinghua University, Beijing, 100084, China;(2) Institute of Microelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China
Abstract:Ni0.4Cu0.2Zn0.4Fe2O4 thin films were fabricated on Si substrates by using the sol-gel method and rapid thermal annealing (RTA), and their magnetic properties and crystalline structures were investigated. The samples calcined at and above 600 °C have a single-phase spinel structure and the average grain size of the sample calcined at 600°C is about 20 nm. The initial permeability μ i , saturation magnetization M s and coercivity H c of the samples increase with the increasing calcination temperature. The sample calcined at 600°C exhibits an excellent soft magnetic performance, which has μ i =33.97 (10 MHz), H c=15.62 Oe and M s=228.877 emu/cm3. Low-temperature annealing can enhance the magnetic properties of the samples. The work shows that using the sol-gel method in conjunction with RTA is a promising way to fabricate integrated thin-film devices. Funded by the National Natural Science Foundation of China (No. 90607021).
Keywords:Ni0  4Cu0  2Zn0  4Fe2O4 thin films  sol-gel method  rapid thermal processing  magnetic properties
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