非晶LiSiON薄膜电解质的全固态薄膜锂电池性能

全固态薄膜锂电池(TFLB)是理想的微电子系统电源.目前报道的固态非晶电解质存在离子电导率偏低的问题,限制了TFLB性能的提升.本工作采用磁控溅射法制备了一种新型非晶锂硅氧氮(LiSiON)薄膜用作TFLB的固态电解质.结果表明,优化制备条件后的LiSiON薄膜具有6.3×10–6 S·cm–1的高离子电导率以及超过5...

Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

All-solid-state thin film lithium battery (TFLB) is regarded as the ideal power source for microelectronic devices. However, the relatively low ionic conductivity of amorphous solid-state electrolyte limits the improvement of electrochemical performance for TFLB. In this work, amorphous lithium silicon oxynitride (LiSiON) thin films are prepared by magnetron sputtering as solid-state electrolyte for TFLB. With optimized deposition condition, the LiSiON thin film exhibits a high ionic conductivity of 6.3×10^-6 S?cm^-1 at room temperature and a wide voltage window over 5 V, making it a suitable thin film electrolyte for TFLB. A MoO₃/LiSiON/Li TFLB is constructed based on the LiSiON thin film electrolyte with large specific capacity (282 mAh?g^-1 at 50 mA?g^-1), good rate capability (50 mAh?g^-1 at 800 mA?g^-1), and acceptable cycle life (78.1% capacity retention after 200 cycles), demonstrating the feasibility of this electrolyte for practical applications.