| 电子材料分析中的能谱干扰峰 |
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| 引用本文： | 施明哲,董本霞. 电子材料分析中的能谱干扰峰[J]. 电子产品可靠性与环境试验, 2002, 0(4): 46-49 |
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| 作者姓名： | 施明哲 董本霞 |
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| 作者单位： | 信息产业部电子第五研究所,广东,广州,510610 |
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| 摘 要： | 主要阐述了在电子元器件分析中用能谱仪作定性分析时常见的一些干扰峰和容易混淆及误判的一些谱峰。主要有和峰、逃逸峰以及一些在元器件材料分析中常遇到的元素特征峰之间的交错重叠的识别和判定方法，并把这些容易误判的谱线整理列成3种表格，以供参考，这些数据基本覆盖了在X射线能谱仪中可能出现的所有相关的谱峰。
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| 关 键 词： | 电子材料 能谱干扰峰 能谱仪 定性分析 特征X射线 和峰 逃逸峰 重叠峰 |
| 修稿时间： | 2002-05-06 |
The Energy Spectrum Disturbing Peak in the Analyzing of Electron Material |
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| SHI Ming - zhe,DONG Ben - xia CEPREI,Guangzhou ,China. The Energy Spectrum Disturbing Peak in the Analyzing of Electron Material[J]. Electronic Product Reliability and Environmental Testing, 2002, 0(4): 46-49 |
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| Authors: | SHI Ming - zhe DONG Ben - xia CEPREI Guangzhou China |
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| Affiliation: | SHI Ming - zhe,DONG Ben - xia CEPREI,Guangzhou 510610,China |
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| Abstract: | The common disturbing peak and easily confused or misdistinguished spectrum peak seen in the analysis of electronic part when energy dispersive spectromenter is used to make qualitative analysis are presented, mainly including sum peak, escape peak and identification and decision method of the interlace and over lap in among element feature peak experienced in the analysis of part and material. Also the easily misdistinguished spectral lines are arranged in three kinds of tables to be referred to. These data almost cover all the correlative spectrum peaks probably arisen in the X - ray energy spectrum. |
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| Keywords: | energy dispersive spectromenter qualitative analysis feature X - ray sum peak escape peak overlapping peak |
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