| 脉冲磁控溅射制备树脂镜片红外防护功能薄膜 |
| |
| 引用本文： | 冯海华,胡川,陈娇洁,王媛媛,厉以宇.脉冲磁控溅射制备树脂镜片红外防护功能薄膜[J].激光与光电子学进展,2011(3):98-102. |
| |
| 作者姓名： | 冯海华 胡川 陈娇洁 王媛媛 厉以宇 |
| |
| 作者单位： | 温州医学院眼视光学院卫生部视觉科学研究重点实验室;温州医学院附属眼视光医院; |
| |
| 基金项目： | 浙江省科技计划(2009C31136)资助课题 |
| |
| 摘 要： | 选取氮化硅和二氧化硅作为薄膜材料,借助膜系设计软件对膜系结构进行优化,采用中频脉冲磁控溅射技术进行薄膜制备.利用高反膜透射曲线拟合方法调整薄膜的实际沉积速率,减少膜厚控制误差,在树脂镜片CR39基底的凸面和凹面上分别镀制了符合设计要求的红外防护膜和可见光减反膜.镀膜后树脂镜片在420-680 nm的平均透过率大于95%...
|
| 关 键 词： | 薄膜 红外防护膜 中频脉冲磁控溅射 树脂镜片 |
Anti-IR Films of Resin Lens Prepared by Pulse Magnetron Sputtering |
| |
| Feng Haihua, Hu Chuan, Chen Jiaojie, Wang Yuanyuan, Li Yiyu.Anti-IR Films of Resin Lens Prepared by Pulse Magnetron Sputtering[J].Laser & Optoelectronics Progress,2011(3):98-102. |
| |
| Authors: | Feng Haihua Hu Chuan Chen Jiaojie Wang Yuanyuan Li Yiyu |
| |
| Affiliation: | Feng Haihua1,2 Hu Chuan1,2 Chen Jiaojie1,2 Wang Yuanyuan1,2 Li Yiyu1,2(1Key Laboratory of Vision Science Research,Ministry of Health,Optometry & Ophthalmology,Wenzhou Medic College,Wenzhou,Zhejiang 325027,China 2Eye Hosptial of Wenzhou Medical College,China) |
| |
| Abstract: | SiO_2 and Si_3N_4 are chosen as coating materials.The structure of thin films is optimized by using software.Mid-frequency pulse magnetron sputtering is adopted to prepare the films.Deposition rate is calibrated by fitting the measured transmittivity curve of high-reflective thin films,which improves the precision of film thickness monitoring.The anti-IR films and visible light anti-reflective films are successfully deposited on the convex and concave suface of CR39 resin lens respectively.At normal inciden... |
| |
| Keywords: | thin films anti-IR films mid-frequency pulse magnetron sputtering resin lens |
| 本文献已被 CNKI 等数据库收录！ |
|
