单晶炉低速动平衡

生产高精度硅晶体的单晶炉,其上部的籽晶提升机构为转轴竖直安装的非对称低速旋转机构,生产过程中下面软轴的摆动幅度是衡量单晶炉性能的重要参数之一,如果摆动过大,将直接影响所生产的硅晶体的质量.动不平衡是造成软轴摆动的重要原因之一,采用激光测振仪测量籽晶提升机构微小振动量,用影响系数法对单晶炉籽晶提升机构进行现场整机动平衡,减小了该机构振动对软体摆动的影响,提高了所拉晶体的质量.

Low speed dynamic balance for crystal growing furnaces

Crystal growing furnaces is a machine of producing high accuracy silicon crystal,and its upside part,the seed crystal lifting organization,is an asymmetrical low speed rotary mechanism,the rolling axis of which installed vertically,the swing range of the flexible axle is a important parameter of the Crystal growing furnaces during the produce,if the range is too wide,it will directly affect the silicon crystal's quality which produces.It use Portable Digital vibrometer measure the small vibration of the see...