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The Status Quo and Development Trend of High-purity Gold Sputtering Targets |
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| Authors: | , YANG Anheng , XIE Hongchao , ZHU Yong |
| Affiliation: | State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Sino-Platinum Metals Co. Ltd,Kunming, 650106,China |
| Abstract: | |
| Keywords: | high-purity gold sputtering targets status quo development trend |
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