| 压电微悬臂梁气体传感器静态弯曲模型的研究 |
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| 引用本文： | 景大雷,王飞,赵学增,王晓明.压电微悬臂梁气体传感器静态弯曲模型的研究[J].传感技术学报,2011,24(5):629-634. |
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| 作者姓名： | 景大雷 王飞 赵学增 王晓明 |
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| 作者单位： | 哈尔滨工业大学机电工程学院;哈尔滨工业大学微系统与微结构制造教育部重点实验室; |
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| 基金项目： | 国家自然科学基金项目(10902031) |
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| 摘 要： | 压电微悬臂梁是一种灵敏度高、尺寸小的生化传感器.分子或原子在压电微悬臂梁功能化表面的吸附会引起悬臂梁的静态弯曲,通过静态变形可以得到微悬臂梁的表面应力.将表面应力引起的微悬臂梁中性层位置的变化引入建模过程,并与能量法相结合,建立了压电微悬臂梁在单分子层吸附稳定后的静态弯曲理论模型.结果发现在相同吸附表面积和吸附量条件下...
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| 关 键 词： | 压电微悬臂梁 气体传感器 吸附势能 静态弯曲 |
Research on Static Bending Model of Piezoelectrical Microcantilever Gas Sensors |
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| JING Dalei,WANG Fei,ZHAO Xuezeng,WANG Xiaoming.Research on Static Bending Model of Piezoelectrical Microcantilever Gas Sensors[J].Journal of Transduction Technology,2011,24(5):629-634. |
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| Authors: | JING Dalei WANG Fei ZHAO Xuezeng WANG Xiaoming |
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| Affiliation: | JING Dalei1,2,WANG Fei1,ZHAO Xuezeng1,WANG Xiaoming1,2 1.School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China,2.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing,Ministry of Education |
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| Abstract: | Piezoelectric microcantilever is a kind of biological and chemical sensor with high sensitivity and reduced dimensions.Adsorption of molecules on surface of piezoelectric microcantilever can cause the microcantilever bending.Taking advantage of the deflection of the microcantilever,the surface can be gotten.In this paper,the change of neutral layer position caused by adsorption-induced stress is introduced into modeling,then a static bending model of microcantilever with monolayer molecules is established b... |
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| Keywords: | piezoelectric microcantilever gas sensors adsorption-potential energy static bending |
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