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Near-infrared absorption enhancement in microstructured silicon by Ag film deposition
Authors:Yanchao Wang  Jinsong Gao  Haigui Yang  Xiaoyi Wang
Affiliation:1.University of the Chinese Academy of Sciences,Beijing,China;2.Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun,China
Abstract:We investigate the influence of spike-like microstructures formed on the silicon surface via fs-laser scanning with different-size on its near-infrared absorption from 1200 to 2500 nm. Although the infrared absorption of the small size microstructures is obviously lower than the large size, it can be further improved to 90 % by a large amount of random and irregular Ag nano particles from a subsequent deposition of Ag thin film. The origins of absorption enhancement are discussed and theoretically analyzed in detail.
Keywords:
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