电子轰击源内空间电荷对其性能的影响

在实际应用中,电子轰击(EI)源内的电子束会引起空间电荷效应,它对离子源性能的影响是不能被忽略的.首先,通过数值计算方法,获得电子轰击源内电场的泊松分布和离子在其内的运动状态,并分析电子轰击源内的空间电荷效应对其性能的影响机理;随后,获得电子轰击源灯丝发射电流与不同离子出射强度的关系曲线,验证理论计算和分析的正确性.

Influence of the Space Charge in Electron Impact Ion Source on Its Performance

In the practical application,space charge will be caused by the electron beam in the electron impact ion source,the influence of which should not be ignored.The passion distribution of electric field in ion source was achieved by the numerical method,and the movement of ions in it was also gotten.After that,with the use of the result from the calculation,the influence of the space charge on the performance of ion source was analyzed.Finally,an experiment was carried out to obtain the relationship between em...