| Ta种子层厚度及溅射速率对Ta/Ni65Co35双层膜各向异性磁电阻和矫顽力的影响 |
| |
| 引用本文： | 张辉, 滕蛟, 马纪东, 于广华, 胡强. Ta种子层厚度及溅射速率对Ta/Ni65Co35双层膜各向异性磁电阻和矫顽力的影响[J]. 工程科学学报, 2005, 27(4): 458-461. DOI: 10.13374/j.issn1001-053x.2005.04.017 |
| |
| 作者姓名： | 张辉 滕蛟 马纪东 于广华 胡强 |
| |
| 摘 要： | 研究了Ta种子层的厚度、溅射速率对Ta/Ni65Co35双层膜各向异性磁电阻值(△ρ/ρ)、矫顽力和织构的影响.研究表明,适当的Ta层厚度和较高的Ta层溅射速率对提高Ta/Ni65Co35双层膜的△ρ/ρ是有效的.Ta种子层的使用增大了Ta/Ni65Co35双层膜的矫顽力而其溅射速率对Ta/Ni65Co35双层膜矫顽力的影响很小.
|
| 关 键 词： | Ta种子层 溅射速率 各相异性磁电阻 矫顽力 (111)织构 |
| 收稿时间： | 2004-05-10 |
| 修稿时间： | 2005-09-10 |
Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni65Co35 bilayers |
| |
| ZHANG Hui, TENG Jiao, MA Jidong, YU Guanghua, HU Qiang. Effects of the thickness and deposition rate of Ta seed layer on the anisotropic mag-netoresistance and coercivity of Ta/Ni65Co35 bilayers[J]. Chinese Journal of Engineering, 2005, 27(4): 458-461. DOI: 10.13374/j.issn1001-053x.2005.04.017 |
| |
| Authors: | ZHANG Hui TENG Jiao MA Jidong YU Guanghua HU Qiang |
| |
| Abstract: | The effects of the thickness and deposition rate of Ta seed layer on the anisotropic magnetoresistance (AMP.) and coercivity ofTa/Ni65Co35 bilayers were investigated. The results showed that △ρ/ρ of Ta/Ni65Co35 bilayers could be improved at a certain thickness or higher deposition rate. The coercivity of Ta/Ni65Co35 films increased with the use of Ta seed layer. But the effect of the deposition rate on the coercivity of Ta/Ni65Co35 films was not significant. |
| |
| Keywords: | Ta seed layer deposition rate anisotropic magnetoresistance coercivity (111) texture |
|
| 点击此处可从《工程科学学报》浏览原始摘要信息 |
|
点击此处可从《工程科学学报》下载全文 |
