Simulation of micromotor based on SOI structure

Problems of simulating an electrostatic micromotor based on the SOI structure with the use of application programs are discussed. Results of calculating the construction of the electrostatic micromotor over a wide frequency range are presented. It is shown that, when increasing the direct voltage applied to control electrodes, the useful capacity increases and the parasitic capacity decreases; at the same time, the front of the amplitude-frequency characteristic is transferred to the low-frequency region.