An automatic thin-film thickness indicator implemented with a Z-80 microcomputer |
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Authors: | Juh Tzeng Lue |
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Affiliation: | Department of Physics, National Tsing Hua University, Hsinchu, Taiwan, Republic of China |
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Abstract: | An automatic display of thin-film thickness during vacuum deposition based on Z-80 microcomputer is demonstrated. The film thickness can be displayed directly in nm during deposition whenever a key is touched. The maximum deposition thickness and the measuring accuracy can be easily adjusted by loading a proper time constant to channels 0 and I of the counter-timer-circuit. |
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