Nano-embossing technology on ferroelectric thin film Pb(Zr0.3,Ti0.7)O3 for multi-bit storage application |
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Authors: | Shen Zhenkui Chen Zhihui Lu Qian Qiu Zhijun Jiang Anquan Qu Xinping Chen Yifang Liu Ran |
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Affiliation: | ASIC & System State Key Laboratory, Department of Microelectronics, Fudan University, Shanghai, 200433, China. yifang.chen@stfc.ac.uk. |
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Abstract: | In this work, we apply nano-embossing technique to form a stagger structure in ferroelectric lead zirconate titanate Pb(Zr0.3, Ti0.7)O3 (PZT)] films and investigate the ferroelectric and electrical characterizations of the embossed and un-embossed regions, respectively, of the same films by using piezoresponse force microscopy (PFM) and Radiant Technologies Precision Material Analyzer. Attributed to the different layer thickness of the patterned ferroelectric thin film, two distinctive coercive voltages have been obtained, thereby, allowing for a single ferroelectric memory cell to contain more than one bit of data. |
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