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Using a TiO2/ZnO double-layer film for improving the sensing performance of ZnO based NO gas sensor |
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| Authors: | Chia-Yu LinAuthor VitaeJiang-Ging ChenAuthor Vitae Wei-Yi FengAuthor VitaeChii-Wann LinAuthor Vitae Ju-Wen HuangAuthor VitaeJames J. TunneyAuthor Vitae Kuo-Chuan HoAuthor Vitae |
| Affiliation: | a Department of Chemical Engineering, National Taiwan University, Taipei 10617, Taiwan b Institute of Biomedical Engineering, National Taiwan University, Taipei 10617, Taiwan c Institute of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan d Institute for Chemical Process and Environmental Technology, National Research Council of Canada, Ottawa K1A 0R6, Canada e Institute of Polymer Science and Engineering, National Taiwan University, Taipei 10617, Taiwan |
| Abstract: | NO gas sensors, based on ZnO thin film (ZnOfilm), TiO2 nanoparticulate film (TiO2NP), and TiO2NP/ZnOfilm double-layer film, were fabricated, and their sensing characteristics towards NO gas were investigated in this study. The maximal response of a ZnOfilm deposited onto a rougher Al2O3 substrate, towards NO gas, was higher than that of a ZnOfilm deposited on a smoother glass substrate. Although the sensing response of the TiO2NPs itself towards NO gas was minute, the TiO2NP/ZnOfilm double-layer film showed enhanced response as compared with TiO2NP or ZnOfilm single-layer film. In addition, the sensor response of the TiO2NP/ZnOfilm double-layer film was strongly influenced by the annealing time for the film preparation; the maximum response to NO was enhanced about 6.2 times as the annealing time was increased from 30 min to 2 h. Based on the XPS results, the increase in the transition zone between TiO2NP and ZnOfilm along with the appearance of Ti3+ state was noticed when the annealing time was increased. With the high sensitive TiO2NP/ZnOfilm/Al2O3 electrode, the limit of detection (S/N = 3) can be achieved at 8.8 ppb. The double-layer TiO2NP/ZnOfilm also showed improved selectivities with respect to NO2 and CO. |
| Keywords: | Gas sensor Nitric oxide Titanium oxide Zinc oxide |
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