Influence of ion assisted deposition on interface broadening in Fe/Al multilayers investigated by medium energy ion scattering |
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| Authors: | M.S. Al-Busaidi P. Bailey T.C.Q. Noakes M.D. Cropper |
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| Affiliation: | aCollege of Science, Physics Department, Sultan Qaboos University, P.O. Box 36, Al-Khod 123, Oman;bDepartment of Physics, Loughborough University, Loughborough LE11 3TU, United Kingdom;cSTFC, Daresbury Laboratory, Daresbury, Warrington WA4 4AD, United Kingdom |
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| Abstract: | Trilayers of Al/Fe/Al and Al/Fe multilayers produced by magnetron sputtering both with and without ion assistance have been depth profiled using Auger electron spectroscopy and medium energy ion scattering. Important differences are observed in the layer structure, with ion assisted deposition giving the narrowest Al/Fe interfaces and so maintaining the most clearly defined layer structure. Both types of sputtering result in some oxygen contamination, particularly at the surface that modeling shows to be associated with the Al layers. |
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| Keywords: | Iron Aluminium Multilayer MEIS Magnetron Depth profiling Trilayer |
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