Design,fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump

We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar.