| 交流脉冲式磁控溅射靶极电源的研制 |
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| 引用本文： | 陈侃松,顾豪爽.交流脉冲式磁控溅射靶极电源的研制[J].仪器仪表学报,2006,27(12):1651-1655. |
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| 作者姓名： | 陈侃松 顾豪爽 |
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| 作者单位： | 湖北大学物理学与电子技术学院,武汉,430062 |
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| 摘 要： | 本文介绍了一种中频交流脉冲式磁控溅射靶极电源。该电源采用全桥逆变拓扑电路、PWM控制方式、输出功率叠加的方案，具有快速的过流检测与保护功能。在等离子体负载下进行了抑制弧光放电和空心阴极效应的实验，同低频直流脉冲电源相比，交流脉冲放电对其抑制是非常有效的。这表明该电源作为磁控溅射靶极电源是完全可行的，也为进一步探索交流磁控溅射新工艺提供了可靠的研究设备。
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| 关 键 词： | 中频交流脉冲式靶极电源 过流保护 弧光放电 空心阴极放电 |
| 修稿时间： | 2005年12月1日 |
Developing of alternative current pulsed magnetron sputtering cathode's power supply |
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| Chen Kansong,Gu Haoshuang.Developing of alternative current pulsed magnetron sputtering cathode''''s power supply[J].Chinese Journal of Scientific Instrument,2006,27(12):1651-1655. |
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| Authors: | Chen Kansong Gu Haoshuang |
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| Abstract: | An alternative current medium frequency pulsed magnetron sputtering cathode power supply was introduced.It has following characteristics: full bridge inverter,PWM control, power superimposition,and rapid over-current protection.The experiments on restraining arc discharge and hollow cathode discharge were carried out using this power supply.Experimental results indicate that comparing with DC low frequency pulsed power supply,this power supply has stronger restraining capability.The proposed power supply is feasible to be used as a cathode power supply and is a good researching device for AC magnetron sputtering technology. |
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| Keywords: | AC medium frequency pulsed cathode power supply over-current protection arc discharge hollow cathode discharge |
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