Memory array architecture and decoding scheme for 3 V only sectorerasable DINOR flash memory |
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Authors: | Kobayashi S. Nakai H. Kunori Y. Nakayama T. Miyawaki Y. Terada Y. Onoda H. Ajika N. Hatanaka M. Miyoshi H. Yoshihara T. |
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Affiliation: | ULSI Lab., Mitsubishi Electr. Corp., Itami; |
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Abstract: | A memory array architecture and row decoding scheme for a 3 V only DINOR (divided bit line NOR) flash memory has been designed. A new sector organization realizes one word line driver per two word lines, which is conformable to tight word line pitch. A hierarchical negative voltage switching row decoder and a compact source line driver have been developed for 1 K byte sector erase without increasing the chip size. A bit-by-bit programming control and a low threshold voltage detection circuit provide a high speed random access time at low Vcc and a narrow program threshold voltage distribution. A 4 Mb DINOR flash memory test device was fabricated from 0.5 μm, double-layer metal, triple polysilicon, triple well CMOS process. The cell measures 1.8×1.6 μm2 and the chip measures 5.8×5.0 mm 2. The divided bit line structure realizes a small NOR type memory cell |
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