| 薄膜单点力传感器 |
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| 引用本文： | 周高峰,赵玉龙,蒋庄德.薄膜单点力传感器[J].机械工程学报,2009,45(7):238-242. |
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| 作者姓名： | 周高峰 赵玉龙 蒋庄德 |
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| 作者单位： | 西安交通大学机械制造系统工程国家重点实验室 |
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| 基金项目： | 国家自然科学基金，教育部新世纪优秀人才支持计划，科技部国际合作项目 |
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| 摘 要： | 针对处于点啮合状态下物体间啮合力的检测问题，提出薄膜单点力传感器。根据物体间啮合力较大的实际检测状况，利用碳二硫化钼压敏电阻油墨的轴向实心柱式压阻效应实现对点啮合物体间啮合力的检测。在研究现有成熟的丝网印制工艺基础上，通过丝网印制技术制作了薄膜单点力传感器，其厚度为0.15 mm。试验测试与分析可知，薄膜单点力传感器能够检测出点啮合物体间的啮合力；并且该传感器具有良好的性能，如灵敏度为 962.5 Ω/N，分辨率为0.002 N。
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| 关 键 词： | 薄膜力传感器 点啮合 丝网印制 压敏电阻油墨 |
Thin Film Single-point Force Sensor |
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| ZHOU Gaofeng,ZHAO Yulong,JIANG Zhuangde.Thin Film Single-point Force Sensor[J].Chinese Journal of Mechanical Engineering,2009,45(7):238-242. |
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| Authors: | ZHOU Gaofeng ZHAO Yulong JIANG Zhuangde |
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| Affiliation: | State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University |
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| Abstract: | Aim at meshing force detection between single-point meshing objects, thin film single-point force sensor is brought forward. According to the actual condition of larger force between single-point meshing objects, axially piezoresistive effect of carbon molybdenum disulfide piezoresistive ink is utilized to realize the detection of the mutual force. On the basis of researching the mature technologies of silk-screen printing, a thin film single-point force sensor of 0.15 mm thick is made by using silk-screen ... |
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| Keywords: | Thin film force sensor Point meshing Piezoresistive ink Silk-screen printing |
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