| 金属薄膜力学性能的有限元分析 |
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| 引用本文： | 任德斌,陈英,靳朝辉,张广平.金属薄膜力学性能的有限元分析[J].沈阳建筑工程学院学报(自然科学版),2007,23(1):29-32. |
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| 作者姓名： | 任德斌 陈英 靳朝辉 张广平 |
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| 作者单位： | 沈阳建筑大学土木工程学院，沈阳建筑大学土木工程学院，贵州省六盘水市水矿(集团)建业总公司，中国科学院金属研究所沈阳材料科学国家(联合)实验室 辽宁沈阳110168，辽宁沈阳110168，中国科学院金属研究所沈阳材料科学国家(联合)实验室，辽宁沈阳110015，贵州六盘水553000，辽宁沈阳110015 |
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| 基金项目： | 建设部科研项目;国家自然科学基金 |
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| 摘 要： | 目的获得较为精确的金属薄膜弹性模量E的计算公式.方法用有限元方法对修正后的Sneddon方程进行验证.结果修正后的Sneddon方程求出的弹性模量与真实的弹性模量基本吻合.结论经验证,笔者提出的Sneddon方程的修正方程计算精度更为精确.
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| 关 键 词： | 弹性模量 Sneddon方程 纳米压痕 有限元 |
| 文章编号： | 1671-2021（2007）01-0029-04 |
| 修稿时间： | 2006-07-29 |
An Analysis of Finite Element Method for the Mechanical Properties of Thin Metallic Films |
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| REN Debin,CHEN Ying,JIN Zhaohui,ZHANG Guangping.An Analysis of Finite Element Method for the Mechanical Properties of Thin Metallic Films[J].Journal of Shenyang Archit Civil Eng Univ: Nat Sci,2007,23(1):29-32. |
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| Authors: | REN Debin CHEN Ying JIN Zhaohui ZHANG Guangping |
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| Affiliation: | 1. School of Civil Engineering, Shenyang Jianzhu University, Shenyang 110168, China; 2. Shenyang National Laboratory for Materials, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China ; 3. Construction Cooperation of Liupanshui of Guizhou Province, Liupanshui 553000, China |
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| Abstract: | The purpose of this paper is to obtain a more accurate equation to calculate the elastic modulus,E(Young's modulus) of thin metallic film.We verify the corrected Sneddon's equations by using the finite element method and find out that the elastic modulus derived from the corrected Sneddon's equations are consistent with the true elastic modulus.We bring forward a more accurate corrected equation,and it is proved that this corrected equation is more accurate than ever before. |
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| Keywords: | elastic modulus Sneddon's equation nanoindentation finite element method |
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