| 新型结构碳材料——碳纳米针 |
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| 引用本文： | 张雷,王小平,王丽军,段新超,王降洋,雷通,吕承瑞. 新型结构碳材料——碳纳米针[J]. 微细加工技术, 2008, 0(5) |
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| 作者姓名： | 张雷 王小平 王丽军 段新超 王降洋 雷通 吕承瑞 |
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| 作者单位： | 上海理工大学理学院,上海,200093 |
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| 基金项目： | 上海市教育发展基金 |
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| 摘 要： | 采用钟罩式微波等离子体化学气相沉积(MWPCVD)设备,以氢气和甲烷作为反应气源,制备了一种新型结构碳材料--碳纳米针.通过扫描电子显微镜和拉曼光谱仪对其形态结构和成份进行了分析研究,结果表明,该种新型结构碳材料具有与碳纳米棒、碳纳米丝相似的性质,而且由于这种碳纳米针独特的结构,更适用于作为扫描探针显微镜的电子探针,从而使得其在某些领域(如电子源探针、扫描探针显微技术、纳米电子器件等)具有潜在的应用前景.
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| 关 键 词： | 纳米碳材料 微波等离子体化学气相沉积 碳纳米针 |
A Novel One-dimensional Structure Carbon Material-Carbon Nano-needles |
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| ZHANG Lei,WANG Xiaoping,WANG Lijun,DUAN Xinchao,WANG Longyang,LEI Tong,LV Chengrui. A Novel One-dimensional Structure Carbon Material-Carbon Nano-needles[J]. Microfabrication Technology, 2008, 0(5) |
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| Authors: | ZHANG Lei WANG Xiaoping WANG Lijun DUAN Xinchao WANG Longyang LEI Tong LV Chengrui |
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| Affiliation: | ZHANG Lei,WANG Xiao-ping,WANG Li-jun,DUAN Xin-chao,WANG Long-yang,LEI Tong,LV Cheng-rui(College of Science,University of Shanghai for Science , Technology,Shanghai 200093,China) |
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| Abstract: | Carbon nano-needles material was grown on Si substrates by microwave plasma chemical vapor deposition(MPCVD) system.Its structural properties was investigated by using scanning electron microscope(SEM) and Raman spectrograph,and this kind of carbon material have the similar property to carbon nanorods and nano-wires.It is superior to that of carbon nano-tube and nano-wires in some field applications for its special structure,such as electron micro-probe which must to have high slenderness ratio. |
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| Keywords: | nano carbon material microwave plasma chemistry vapor deposition carbon nano-needles |
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