Epitaxial,electro-optically active barium titanate thin films on silicon by chemical solution deposition |
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| Authors: | Bryce I Edmondson Sunah Kwon Chon H Lam J Elliott Ortmann Alexander A Demkov Moon J Kim John G Ekerdt |
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| Affiliation: | 1. Department of Chemical Engineering, The University of Texas at Austin, Austin, TX, USA;2. Department of Materials Science and Engineering, The University of Texas at Dallas, Richardson, TX, USA;3. Department of Physics, The University of Texas at Austin, Austin, TX, USA |
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| Abstract: | Recent progress in the integration of BaTiO3 thin films with silicon has shown great promise for the development of on-chip photonic devices. However, the highest performing thin films in the literature are deposited by costly and/or complex vacuum techniques. In this study, epitaxial BaTiO3 thin films are deposited on thin SrTiO3 template layers on Si(001) from an alkoxide-based chemical solution under atmospheric conditions and yield an effective Pockels coefficient of 27 ± 4 pm/V for an ~85 nm film. Film crystallinity, microstructure, and defect nature are examined by X-ray diffraction and high-resolution transmission and scanning electron microscopy techniques and discussed within the context of the growth method as well as the observed electro-optical response. |
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| Keywords: | barium titanate perovskites sol-gel thin films |
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