Optical properties of sol–gel deposited Al2O3 films |
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Authors: | Nilgün
zer John P Cronin Yong-Jin Yao Antoni P Tomsia |
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Affiliation: | a Istanbul University, Faculty of Science, Physics Department, Vezneciler 34459, Istanbul, Turkey;b Donnelly Corp. Advanced Technology Center, 4545 East Lowell Road, Tucson, AZ 85712, USA;c Lawrence Berkeley National Laboratory, 1 Cyclotron Road MS. 62-203, Berkeley, CA 94720, USA |
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Abstract: | Highly transparent, uniform and corrosion resistant Al2O3 films were prepared on stainless-steel and quartz substrates by the sol–gel process from stable coating solutions using aluminum-sec-butoxide, Al(OBus)3 as precursor, acetylacetone, AcAcH as chelating agent and nitric acid, HNO3, as catalyzer. Films up to 1000 nm thick were prepared by multiple spin coating deposition, and were characterized by X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), thermogravimetric analysis (TGA), differential scanning calorimetry (DSC), Fourier transform infrared spectroscopy (FTIR), optical spectroscopy and micro Vickers hardness test. XRD of the film heat treated at 400°C showed that they had an amorphous structure. XPS confirmed that they were stoichiometric Al2O3. The refractive index (n) and extinction coefficient (k) were found to be n=1.56±0.01 and k=0.003±0.0002 at 600 nm, respectively. The surface microhardness and corrosion resistance investigations showed that Al2O3 films improved the surface properties of stainless-steel substrates. |
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Keywords: | Al2O3 Sol– gel deposition Scanning spectrophotometer Optical properties Corrosion resistance |
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