Integrated sensor array for analysis of multicomponent gas mixtures |
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| Authors: | V. I. Anisimkin É. Verona V. E. Zemlyakov R. G. Kryshtal’ A. V. Medved’ |
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| Affiliation: | (1) Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Moscow;(2) O. M. Corbino Institute of Acoustics, National Research Council of Italy, Rome |
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| Abstract: | A new device has been proposed and tested experimentally for the discrimination of gases in “electronic nose” systems. The device consists of an array of surface-acoustic wave (SAW) sensors positioned on a single anisotropic substrate with a common gas-sensitive coating for each sensor. The specificity of the sensors is provided entirely by the elastic anisotropy of the single-crystal substrate: changes in the direction of propagation of the wave through the gas-sensitive film deposited on the anisotropic substrate are accompanied by changes in the partial components of the mechanical displacement of the wave and corresponding contributions to the resultant SAW “response.” Pis’ma Zh. Tekh. Fiz. 24, 40–45 (August 26, 1998) |
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