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一种新型激光测量仪在X-Y工作台定位误差动态测量和补偿中的应用
引用本文:丁海峰.一种新型激光测量仪在X-Y工作台定位误差动态测量和补偿中的应用[J].机床与液压,2010,38(6).
作者姓名:丁海峰
作者单位:聊城职业技术学院,山东聊城,252000
摘    要:论述新型激光测量仪OFV-5000的测量原理和方法,分析X-Y工作台定位误差的构成,指出滚珠丝杠的螺距误差是影响工作台定位精度的主要因素,结合实验室的具体情况设计了一种X-Y工作台定位误差的动态测量方法。在分析定位误差的基础上,提出采用前馈补偿方法减小定位误差,并通过实验证明前馈补偿对提高系统定位精度非常有效。

关 键 词:X-Y工作台  激光测量仪OFV-5000  定位误差  动态测量  补偿  

Application of a New Type of Laser Vibration Measurer on the Dynamic Measurement and Compensation of Position Errors of X-Y Table
DING Haifeng.Application of a New Type of Laser Vibration Measurer on the Dynamic Measurement and Compensation of Position Errors of X-Y Table[J].Machine Tool & Hydraulics,2010,38(6).
Authors:DING Haifeng
Affiliation:Liaocheng Vocational and Technical College;Liaocheng Shandong 252000;China
Abstract:The principle and measurement method of a new type of laser vibrometer controller OFV-5000 were introduced,the composition of position errors of X-Y table was analyzed,it was pointed out that the cumulation error of screw rod is the primary factor which affects the position error of the X-Y table.A method of dynamic measurement and compensation of position errors of X-Y table was presented.The position errors were analyzed,the feedforward compensatory means was put forward to reduce the position errors and ...
Keywords:X-Y table  Laser vibrometer controller OFV-5000  Position errors  Dynamic measurement  Compensation  
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