| 微波铁氧体器件薄膜的制备及性能研究 |
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| 引用本文： | 杨已青,郑梁,武军,刘建,秦会斌,胡冀,徐军明.微波铁氧体器件薄膜的制备及性能研究[J].杭州电子科技大学学报,2010,30(5):1-4. |
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| 作者姓名： | 杨已青 郑梁 武军 刘建 秦会斌 胡冀 徐军明 |
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| 作者单位： | 杭州电子科技大学新型电子器件与应用研究所; |
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| 基金项目： | 国家自然科学基金资助项目，浙江省自然科学基金资助项目 |
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| 摘 要： | 该文采用RF磁控溅射工艺制备了射频薄膜电感用的铁氧体薄膜。为了降低铁氧体薄膜在高频下的涡流损耗、剩余损耗等,通过对铁氧体材料的磁特性分析,研究了不同的温度、成分掺杂对铁氧体磁性能的影响,获得了矫顽力为5.619 6Guss的铁氧体薄膜,并采用SEM、XRD对铁氧体薄膜表面结构进行了表征,采用VSM对薄膜磁性能进行了测试。
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| 关 键 词： | 铁氧体薄膜 磁控溅射 矫顽力 |
Preparation and Properties of Microwave Ferrite Thin Films |
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| YANG Yi-qing,ZHENG Liang,WU Jun,LIU Jian,QIN Hui-bin,HU Ji,XU Jun-ming.Preparation and Properties of Microwave Ferrite Thin Films[J].Journal of Hangzhou Dianzi University,2010,30(5):1-4. |
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| Authors: | YANG Yi-qing ZHENG Liang WU Jun LIU Jian QIN Hui-bin HU Ji XU Jun-ming |
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| Affiliation: | YANG Yi-qing,ZHENG Liang,WU Jun,LIU Jian,QIN Hui-bin,HU Ji,XU Jun-ming(Institute of Electron Device & Application,Hangzhou Dianzi University,Hangzhou Zhejiang 310018,China) |
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| Abstract: | In this paper,the ferrite thin films used for RF thin films inductances were prepared by RF magnetron sputtering technique.In order to decrease the eddy current and residual loss,the effect of different temperature and doping compositions on magnetic property of the ferrite films was studied.The surface structure and the magnetic property of the films were measured by SEM,XRD and VSM,respectively.The result showed that the ferrite thin films with coercivity of 5.6196Guss were obtained. |
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| Keywords: | ferrite thin films magnetron sputtering coercivity |
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