| 离子束刻蚀设备中离子源故障诊断和维修 |
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| 引用本文： | 赵建恒. 离子束刻蚀设备中离子源故障诊断和维修[J]. 电子工业专用设备, 2013, 0(5): 58-61 |
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| 作者姓名： | 赵建恒 |
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| 作者单位： | 中国电子科技集团公司第十三研究所,河北石家庄050051 |
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| 摘 要： | 介绍了离子束加工技术在半导体工艺中的应用以及离子束刻蚀机的真空和控制系统、Veeco直流栅极离子源及其电源MPS-5001的结构和工作原理、PBN中和器的原理和作用。介绍了离子源电源参数的调整技巧及需要注意的问题,在此基础上给出了离子源常见故障现象的原因及解决办法。
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| 关 键 词： | 离子源 离子束刻蚀 故障诊断 考夫曼 PBN中和器 |
The Fault Diagnose and Troubleshooting of the Ion Source in Ion Beam Etching Device |
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| Zhao Jianheng. The Fault Diagnose and Troubleshooting of the Ion Source in Ion Beam Etching Device[J]. Equipment for Electronic Products Marufacturing, 2013, 0(5): 58-61 |
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| Authors: | Zhao Jianheng |
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| Affiliation: | Zhao Jianheng(The 13thResearch Institute of CETC,Shijiazhuang 050051,China) |
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| Abstract: | The appliacation of ion beam technology in semiconductor process device is introduced.The vacumm system and control system in ion beam etching are explained.The analysis of the construction and principle of Vecco DC grid ion source and its power supply MPS 5001 is given.The principle and fuction of PBN are explained.The skill and attention in ion source power supply parameter adjustment is introduced,then the fault and the cause and the troubleshooting are listed. |
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| Keywords: | Ion source Ion beam etching Fault diagnose Kaufman PBN neutralizer |
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