| 温度对悬浮浆料黏度的影响 |
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| 引用本文： | 李强,马玉通,杨士超. 温度对悬浮浆料黏度的影响[J]. 电子工业专用设备, 2013, 0(8): 13-15,39 |
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| 作者姓名： | 李强 马玉通 杨士超 |
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| 作者单位： | 中国电子科技集团公司第四十六研究所,天津300220 |
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| 摘 要： | 多线切割在光伏以及半导体行业中有着广泛的应用,多线切割所用的悬浮浆料有着非常重要的作用,悬浮浆料由悬浮液和SIC切割微粉配制并长时间搅拌而成,性能优良的悬浮浆料兼有切削、黏滞、冷却3大功能,可以有效提高硅片质量,提高生产效率,研究其特性对于科研生产意义重大,通过对悬浮液特性的研究,进而研究悬浮浆料对切割效果的影响,主要是温度对其的影响,说明在生产中,悬浮浆料要控制在适宜的黏度范围内,才能有效控制晶片质量。
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| 关 键 词： | 多线切割 悬浮浆料 黏度 |
Temperature on the Viscosity of Slurry |
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| LI Qiang,MA Yutong,YANG Shichao. Temperature on the Viscosity of Slurry[J]. Equipment for Electronic Products Marufacturing, 2013, 0(8): 13-15,39 |
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| Authors: | LI Qiang MA Yutong YANG Shichao |
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| Affiliation: | (the 46th Research Institute of CETC, Tianjin 300220,China) |
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| Abstract: | Multi-wire cutting in the photovoltaic and semiconductor industry has a wide range of applications, multi-wire cutting slurry has a very important role, the slurry and SIC powder preparation and mixing together a long time, excellent performance slurry with cutting, viscosity, cooling , it can effectively improve the quality of silicon, improve production efficiency, we study the characteristics is a great significance for the research and production, the paper studies the characteristics of slurry, and then study pulp effect, the temperature are mainly in the production, the slurry is controlled in a suitable viscosity range, in order to effectively control the quality of the wafer. |
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| Keywords: | Multi-wire cutting Slurry Viscosity |
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