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有源静电轴承的动刚度特性研究
引用本文:韩丰田,高钟毓. 有源静电轴承的动刚度特性研究[J]. 机械工程学报, 2004, 40(3): 31-34
作者姓名:韩丰田  高钟毓
作者单位:郑州大学机械工程学院,郑州,450002;清华大学
基金项目:国防基础与应用研究“十五”预研(41309020),河南省青年骨干教师
摘    要:针对补偿负刚度后的静电轴承一转子系统模型,讨论了PID控制参数与动刚度特性的关系,为根据刚度指标确定控制参数提供了理论依据。对三自由度静电球轴承的动刚度分析与实验结果表明,系统在低频与高频段具有较高的支承刚度,而中频刚度较低,刚度幅频特性曲线呈“浴盆”状。在系统通频带内,动态刚度主要由控制器参数决定,而高频刚度主要取决于转子的惯性项。在系统稳定区域,改变控制器参数可以灵活设定系统的动刚度特性。

关 键 词:静电轴承  动刚度  静电悬浮  PID控制
修稿时间:2003-02-21

DYNAMIC STIFFNESS OF ACTIVE ELECTROSTATIC BEARINGS
Han Fengtian Gao Zhongyu. DYNAMIC STIFFNESS OF ACTIVE ELECTROSTATIC BEARINGS[J]. Chinese Journal of Mechanical Engineering, 2004, 40(3): 31-34
Authors:Han Fengtian Gao Zhongyu
Affiliation:Han Fengtian Gao Zhongyu(Zhengzhou University) (Tsinghua University)
Abstract:The relationships between dynamic stiffness properties and PID parameters of active electrostatic bearing and rotor systems based on a stiffness compensated model are investigated. The analytical and experimental results via a three-degrees of freedom electrostatic bearing supporting a spherical rotor demonstrated that the frequency response curve of the bearing stiffness is in a bathtub shape with a minimum value in intermediate frequency range. The dynamic stiffness is mostly determined by controller parameters within the closed-loop bandwidth of electrostatically levitated systems, while the stiffness above the system bandwidth is determined by the inertial stiffness of the rotor. As a result, the stiffness properties may be varied over a certain range by changing the controller parameters within the stable region.
Keywords:Electrostatic bearing Dynamic stiffness Electrostatic levitation PID control
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