a Electronic & Imaging Materials Research Laboraitories, Toray Industries, Inc., 1-1, Sonoyama 1-chome, Otsu, Shiga 520-8558, Japan
b Toray Research Center, Inc., 3-7 Sonoyama 3-chome, Otsu, Shiga 520-8567, Japan
Abstract:
Direct X-ray diffraction measurement of the erased state of the Ge–Sb–Te recording layer in a four-layered phase change optical disk, which was produced by an optical disk drive, was performed. It was identified as an fcc crystal structure. In order to carry out the detailed crystal structure analysis by the powder X-ray diffraction method with Rietveld refinements, somewhat larger amount of the fcc crystal powder was prepared from deposited 10 μm thick films. It revealed that Ge2Sb2Te5 belongs to the NaCl type structure (Fmm) with the 4a site including 20% vacancies. The conclusion was supported by the results of the density measurements with Grazing Incidence of X-ray Reflectivity.