Novel Fabrication of High-Quality ZrO2 Ceramic Thin Films from Aqueous Solution |
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| Authors: | Kentaro Kuratani Masayasu Uemura Minoru Mizuhata Akihiko Kajinami Shigehito Deki |
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| Affiliation: | Department of Molecular Science, Graduate School of Science and Technology, Kobe University, Nada, Kobe 657-8501, Japan; Department of Chemical Science and Engineering, Faculty of Engineering, Kobe University, Nada, Kobe 657-8501, Japan |
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| Abstract: | We report on the direct deposition of high-quality ZrO2 thin films on various kinds of substrates by the liquid phase deposition method. After reaction for 24 h, thin films formed on various kinds of substrates, and the obtained thin film was comprised of densely packed nano-sized particles. The film annealed at 500°C showed a tetragonal phase at room temperature and this phenomenon has been discussed from the viewpoint of crystallite size effect. The result of optical transmittance measurement revealed that high transparency, more than 70% transmittance, has been achieved for the film after annealing at 900°C. |
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