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基于激光位移传感器的面角度测量技术研究
引用本文:彭希锋,陈爽,李海星,熊朝晖.基于激光位移传感器的面角度测量技术研究[J].仪器仪表学报,2017,38(11):2735-2743.
作者姓名:彭希锋  陈爽  李海星  熊朝晖
作者单位:中国工程物理研究院计量测试中心绵阳621200,中国工程物理研究院计量测试中心绵阳621200,中国工程物理研究院计量测试中心绵阳621200,中国工程物理研究院计量测试中心绵阳621200
基金项目:中国工程物理研究院技术基础(15S011)项目资助
摘    要:针对面角度现场测试需求,利用激光位移传感器的漫反射测量特性,搭建了面角度非接触测量装置,提出了一种结合三坐标测量机和位置敏感探测器对激光位移传感器进行空间坐标化标定的方法,从而构建出精确的面角度测量模型;采用蒙特卡洛法对面角度非接触测量装置的不确定度进行评定,在±25°测量范围内其结果为U=0.044°~0.046°(k=2);通过性能验证试验、重复性试验和稳定性试验对装置的性能指标进行考核,在±25°测量范围内其绝对测量示值误差不超过0.036°,重复性不超过0.004°,稳定性不超过0.021°;实验结果表明该基于激光位移传感器的面角度非接触测量装置准确可靠,具备开展面角度现场测试应用的前景。

关 键 词:面角度  激光位移传感器  非接触测量

Study on the plane angle measurement technology based on aser displacement sensors
Peng Xifeng,Chen Shuang,Li Haixing and Xiong Zhaohui.Study on the plane angle measurement technology based on aser displacement sensors[J].Chinese Journal of Scientific Instrument,2017,38(11):2735-2743.
Authors:Peng Xifeng  Chen Shuang  Li Haixing and Xiong Zhaohui
Affiliation:Metrology and Testing Center, China Academy of Engineering Physics, Mianyang 621200, China,Metrology and Testing Center, China Academy of Engineering Physics, Mianyang 621200, China,Metrology and Testing Center, China Academy of Engineering Physics, Mianyang 621200, China and Metrology and Testing Center, China Academy of Engineering Physics, Mianyang 621200, China
Abstract:Aiming at the plane angle in site measurement requirement, a non contact measuring device for plane angle is developed based on the diffuse reflection measurement features of the laser displacement sensors. The spatial coordinate calibration method of the laser displacement sensors are proposed that combines the coordinate measuring machine and position sensitive detector, an accurate measurement model for plane angle is constructed. The Montel Carlo method is used to evaluate the uncertainty of the plane angle non contact measurement device, and the result is U=0.044°~0.046° (k=2) for the angle measurement range of ±25°. The performance verification test, repeatability test and stability test were performed to examine the specifications of the non contact measurement device. The results show that the absolute indication error, repeatability and stability of the device are less than 0.036°, 0.004° and 0.021° respectively in the measurement range of ±25°. The test results demonstrate that the non contact measurement device for plane angle based on laser displacement sensors is accurate, reliable and has the application prospect for the in site measurement of plane angle.
Keywords:plane angle  laser displacement sensor  non contact measurement
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