基于多峰拟合的直线电机动子位置精密测量方法

为满足直线电机动子位置的高精度测量要求,提出一种基于多峰拟合相位相关算法的直线电机动子位置精密测量方法。通过直线电机动子上的高速相机采集相邻栅栏图像;采用相位相关算法得到相邻栅栏图像的相位相关函数;根据相位相关频谱的峰值分布特性,采用多峰拟合获得相邻栅栏图像的亚像素位移值;根据测量系统标定系数,进而获得直线电机动子位置的精确位置。实验结果表明,该亚像素测量方法用于直线电机动子位置检测能达到精密定位,测量精度为1/100 pixel,且具有较强的鲁棒性和较高的实时性。

Ultra precision position detection for linear motor mover based on multi peak fitting

In order to satisfy high precision measurement requirement of the linear motor mover position, a multi peak fitting phase correlation algorithm is proposed. The adjacent fence image is captured with a high speed micro camera installed on the linear motor mover, and the phase correlation function of adjacent fence images is obtained by phase correlation algorithm. According to peaks distribution characteristics of the correlation function, the multimodal fitting method is utilized to acquire subpixel displacement of adjacent fence images. Based on the calibration coefficient of measuring system, the precise position of linear motor mover can be further acquired. Experimental results show that the sub pixel image measuring method can achieve precise positioning, and the position detection accuracy of linear motor mover, can be up to 1/100 pixel, and it has strong robustness and high real time performance.