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透明导电氧化物薄膜的研究现状及展望
引用本文:李家亮,姜洪义,牛金叶,邹科. 透明导电氧化物薄膜的研究现状及展望[J]. 现代技术陶瓷, 2006, 27(1): 19-23
作者姓名:李家亮  姜洪义  牛金叶  邹科
作者单位:1. 武汉理工大学材料科学与工程学院,武汉,430070;山东理工大学分析测试中心,淄博,255049
2. 武汉理工大学材料科学与工程学院,武汉,430070
3. 山东理工大学分析测试中心,淄博,255049
摘    要:综述了TCO薄膜的研究现状,ITO和ZAO薄膜是2种主要的TCO薄膜,其中ITO薄膜是目前应用最广泛的薄膜,ZAO薄膜是目前研究的热点,具有替代ITO的潜能。另外,就透明导电膜目前存在的问题以及发展展望进行了分析讨论。

关 键 词:透明导电  薄膜

Recent Progress and Development Prospect of Transparent and Conducting Films
Li Jialiang,Jiang Hongyi,Niu Jinye,Zou Ke. Recent Progress and Development Prospect of Transparent and Conducting Films[J]. Advanced Ceramics, 2006, 27(1): 19-23
Authors:Li Jialiang  Jiang Hongyi  Niu Jinye  Zou Ke
Affiliation:1 Dept. Materials Science Engineering, Wuhan University of Technology, Wuhan 430070; 2 Analysis and Testing Center,Shandong University of Technology, Zibo 255049
Abstract:In this paper, the recent progress of TCO films was described. As the two primary TCO films, ITO is the most widely used film and ZAO has been the hotspot at present, which may become the substitute of ITO. Besides, some problems concerning the investigation of the tranparaent and conducting films and their possible development were discussed.
Keywords:TCO  ITO  ZAO
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