SOI technology for radio-frequency integrated-circuit applications

This paper presents a silicon-on-insulator (SOI) integration technology, including structures and processes of OFF-gate power nMOSFETs, conventional lightly doped drain (LDD) nMOSFETs, and spiral inductors for radio frequency integrated circuit (RFIC) applications. In order to improve the performance of these integrated devices, body contact under the source (to suppress floating-body effects) and salicide (to reduce series resistance) techniques were developed for transistors; additionally, locally thickened oxide (to suppress substrate coupling) and ultra-thick aluminum up to 6 /spl mu/m (to reduce spiral resistance) were also implemented for spiral inductors on high-resistivity SOI substrate. All these approaches are fully compatible with the conventional CMOS processes, demonstrating devices with excellent performance in this paper: 0.25-/spl mu/m gate-length offset-gate power nMOSFET with breakdown voltage (BV/sub DS/) /spl sim/ 22.0 V, cutoff frequency (f/sub T/)/spl sim/15.2 GHz, and maximal oscillation frequency (f/sub max/)/spl sim/8.7 GHz; 0.25-/spl mu/m gate-length LDD nMOSFET with saturation current (I/sub DS/)/spl sim/390 /spl mu/A//spl mu/m, saturation transconductance (g/sub m/)/spl sim/197 /spl mu/S//spl mu/m, cutoff frequency /spl sim/ 25.6 GHz, and maximal oscillation frequency /spl sim/ 31.4 GHz; 2/5/9/10-nH inductors with maximal quality factors (Q/sub max/) 16.3/13.1/8.95/8.59 and self-resonance frequencies (f/sub sr/) 17.2/17.7/6.5/5.8 GHz, respectively. These devices are potentially feasible for RFIC applications.