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Artificial Cilia: Generation of Magnetic Actuators in Microfluidic Systems
Authors:Jacob Belardi  Nicolas Schorr  Oswald Prucker  Jürgen Rühe
Affiliation:University of Freiburg, Department of Microsystems Engineering (IMTEK), D‐79110 Freiburg, Germany
Abstract:Magnetic artificial cilia are fabricated from photoreactive copolymer precursors filled with magnetic nanoparticles by a new photolithographic process. Two different crosslinkers and UV‐radiation of two different wavelengths are used to generate arrays of planar magnetically actuatable rubber flaps. The cilia are integrated into a microfluidic channel and operated in water using a rotating permanent magnet.
Keywords:actuators  microfluidics  magnetic nanoparticles  lithography  biomimetics
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